Ductile mode machining methods for hard and brittle components of plasma processing apparatuses
AssigneeLam Research Corporation
InventorsJohn F. Stumpf, Timothy Dyer, David Allen Ruberg, Lihua L. Huang
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Abstract
A method of ductile mode machining a component of a plasma processing apparatus wherein the component is made of nonmetallic hard and brittle material wherein the method comprises single point turning the component with a diamond cutting tool causing a portion of the nonmetallic hard and brittle material to undergo a high pressure phase transformation to form a ductile phase portion of the hard and brittle material during chip formation wherein a turned surface is formed from a phase changed material and the turned surface is a grooved textured surface of phase changed material.
Claims20
A method of ductile mode machining a component of a plasma processing apparatus wherein the component is made of nonmetallic hard and brittle material, comprising:
- single point turning the component with a diamond cutting tool causing a portion of the nonmetallic hard and brittle material to undergo a high pressure phase transformation to form a ductile phase portion of the hard and brittle material during chip formation wherein a turned surface is formed from a phase changed material and the turned surface is a grooved textured surface of phase changed material.
Dependencies are inferred from the claim text.