Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium

A non-transitory storage medium storing a computer program used in a substrate treatment apparatus configured such that substrates in a same lot taken out of a carrier are distributed by a delivery mechanism into a plurality of unit blocks for performing a same series of treatments, each unit block comprising a solution treatment module for supplying a treatment solution to a substrate, an ultraviolet irradiation module for irradiating a substrate with an ultraviolet ray, and a substrate carrying mechanism for carrying a substrate between the modules,

• the computer program having a group of steps installed to execute a substrate treatment method using the substrate treatment apparatus,
• wherein the substrate treatment method comprises the steps of:
• detecting an illuminance of a light source of the ultraviolet irradiation module;
• when an illuminance detection value of the ultraviolet irradiation module in one unit block among the plurality of unit blocks becomes a set value or less:
• determining an irradiation time adjusted to a length based on the illuminance detection value that was detected by the illuminance detection part and based on an operating life of the light source,
• controlling the delivery mechanism to stop delivery of a substrate to the one unit block and deliver subsequent substrates to another unit block;
• performing irradiation on substrates which have already been delivered to the one unit block with the irradiation time that is adjusted;
• and
• changing the light source of the ultraviolet irradiation module in the one unit block after ending the irradiation of the substrates which have already been delivered to the one unit block.

A substrate treatment apparatus configured such that substrates in a same lot taken out of a carrier are distributed by a delivery mechanism into a plurality of unit blocks for performing a same series of treatments, each unit block comprising a solution treatment module for supplying a treatment solution to a substrate, an ultraviolet irradiation module for irradiating a substrate with an ultraviolet ray, and a substrate carrying mechanism for carrying a substrate between the modules, the apparatus comprising:

• an illuminance detection part that detects an illuminance of a light source of the ultraviolet irradiation module;
• and
• a control part configured to, when an illuminance detection value of the ultraviolet irradiation module in one unit block among the plurality of unit blocks becomes a set value or less:
• determine which of the substrates are subsequent substrates to deliver to another unit block,
• control the delivery mechanism to stop delivery of a substrate to the one unit block and deliver the subsequent substrates to the another unit block, and
• control the ultraviolet irradiation module to perform irradiation on substrates which have already been delivered to the one unit block with an irradiation time adjusted to a length according to the illuminance detection value.

A non-transitory storage medium storing a computer program used in a substrate treatment apparatus configured such that substrates in a same lot taken out of a carrier are distributed by a delivery mechanism into a plurality of unit blocks for performing a same series of treatments, each unit block comprising a solution treatment module for supplying a treatment solution to a substrate, an ultraviolet irradiation module for irradiating a substrate with an ultraviolet ray, and a substrate carrying mechanism for carrying a substrate between the modules,

• the computer program having a group of steps installed to execute a substrate treatment method using the substrate treatment apparatus,
• wherein the substrate treatment method comprises the steps of:
• detecting an illuminance of a light source of the ultraviolet irradiation module;
• when an illuminance detection value of the ultraviolet irradiation module in one unit block among the plurality of unit blocks becomes a set value or less,
• determining which of the substrates arc subsequent substrates to deliver to another unit block,
• controlling the delivery mechanism to stop delivery of a substrate to the one unit block and deliver the subsequent substrates to the another unit block;
• performing irradiation on substrates which have already been delivered to the one unit block with an irradiation time adjusted to a length according to the illuminance detection value;
• and
• changing the light source of the ultraviolet irradiation module in the one unit block after ending the irradiation of the substrates which have already been delivered to the one unit block.