Pressure measuring instrument
AssigneeSetra Systems, Inc.
InventorsKevin M. Bourbeau, Eric C. Beishline, Michael J. Amirto, Gino A. Pinto, Benjamin F. Fontaine
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AssigneeSetra Systems, Inc.
InventorsKevin M. Bourbeau, Eric C. Beishline, Michael J. Amirto, Gino A. Pinto, Benjamin F. Fontaine
Estimating the term…
A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.
A pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
A pressure sensor comprising:
Dependencies are inferred from the claim text.