Manufacturing method of package structure
AssigneeSubtron Technology Co., Ltd.
InventorsShih-Hao Sun, Chang-Fu Chen
Life of this patent
Estimating the term…
Loading patent…
AssigneeSubtron Technology Co., Ltd.
InventorsShih-Hao Sun, Chang-Fu Chen
Estimating the term…
A manufacturing method of a package structure is provided. In the manufacturing method, a metal substrate having a seed layer is provided. A patterned circuit layer is formed on a portion of the seed layer. A first patterned dry film layer is formed on the other portion of the seed layer. A surface treatment layer is electroplated on the patterned circuit layer with use of the first patterned dry film layer as an electroplating mask. The first patterned dry film layer is removed. A chip bonding process is performed to electrically connect a chip to the surface treatment layer. An encapsulant is formed on the metal substrate. The encapsulant encapsulates the chip, the surface treatment layer, and the patterned circuit layer. The metal substrate and the seed layer are removed to expose a bottom surface of the encapsulant and a lower surface of the patterned circuit layer.
A manufacturing method of a package structure, comprising:
Dependencies are inferred from the claim text.