Back to results
US 8,887,658 B2Granted
Multiple sheath multiple capillary aerosol jet
AssigneeOptomec, Inc.
InventorsMarcelino Essien, Bruce H. King
Life of this patent
Estimating the term…
Abstract
Apparatus and method for depositing aerosolized material, wherein an aerosol flow is surrounded and focused by more than one consecutive sheath gas flows. The combined sheath and aerosol flows may consecutively flow through more than one capillary, thereby narrowing the flow further. Linewidths of less than one micron may be achieved.
Claims14
An apparatus for depositing material, the apparatus comprising:
- an aerosol inlet;
- a first sheath gas inlet;
- a first stage comprising a first region for forming a first annular flow comprising an aerosol flow surrounded by a first sheath flow, and at least one first passage for transporting said first annular flow;
- a second sheath gas inlet;
- a second stage arranged in series with said first stage, said second stage comprising a second region for forming a combined flow comprising a second sheath flow surrounding said first annular flow, and at least one second passage for transporting said combined flow;
- and
- at least one exit capillary for receiving said combined flow, said at least one exit capillary configured to focus the combined flow sufficiently to deposit material in the aerosol with a linewidth less than an orifice diameter of said at least one exit capillary.
4 more elements
An apparatus for depositing material, the apparatus comprising:
- an aerosol inlet;
- a first sheath gas inlet;
- a first region for forming an annular flow comprising an aerosol flow surrounded by a first sheath flow;
- a second sheath gas inlet;
- an intermediate capillary for receiving said annular flow, said intermediate capillary disposed between said first sheath gas inlet and said second sheath gas inlet;
- a second region for forming a combined flow comprising a second sheath flow surrounding said annular flow;
- and
- an exit capillary for receiving said combined flow.
5 more elements
Dependencies are inferred from the claim text.