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US 8,873,341 B2Granted
CMUT cell formed from a membrane of nanotubes or nanowires or nanorods and device for ultra high frequency acoustic imaging including multiple cells of this kind
AssigneesCommissariat A L'energie Atomique Et Aux Energies Alternatives, Laboratoire Central des Ponts et Chaussees, Ecole Nationale des Ponts et Chaussees
InventorsBerengere Lebental, Anne Ghis
Life of this patent
Estimating the term…
Abstract
A cMUT-type capacitive electroacoustic transducer including: at least one membrane configured to oscillate under effect of an electric field and/or an acoustic wave, wherein the membrane is formed from one or more layers of juxtaposed nanotubes or nanowires or nanorods, and an acoustic imaging device or UHF sonar including such transducers.
Claims15
A cMUT capacitive electroacoustic transducer comprising:
- at least one membrane formed from one or more layers of nanotubes or nanowires or nanorods, said transducer being configured to produce ultrasonic acoustic waves by oscillating the membrane under effect of an electric field and being configured to detect ultrasonic acoustic waves by measuring a variation of capacity representative of the ultrasonic waves received by the membrane,
- wherein the membrane is further formed from at least one connecting Graphene layer attached to the nanotubes or nanowires or nanorods.
Dependencies are inferred from the claim text.