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US 8,871,024 B2Granted
High pressure apparatus and method for nitride crystal growth
AssigneeSoraa, Inc.
InventorMark P. D'Evelyn
Life of this patent
Estimating the term…
Abstract
An improved high pressure apparatus and methods for processing supercritical fluids is described. The apparatus includes a capsule, a heater, and at least one ceramic ring contained by a metal sleeve. The apparatus is capable of accessing pressures and temperatures of 0.2-2 GPa and 400-1200° C.
Claims20
Apparatus for high pressure material processing, the apparatus comprising:
- a cylindrical capsule region including a first region and a second region, having a length between the first region and the second region;
- a heating member enclosing the cylindrical capsule region;
- a sleeve member adapted to form a sealed region enclosing the heating member, the sealed region being characterized by an internal pressure level capable of tightening a contact between the sleeve member and a seal;
- a gas pressure intensifier for pumping gaseous species into the sealed region at a predetermined range of pressure levels;
- at least one annular ceramic member having a predetermined thickness disposed continuously around a perimeter of the sleeve member, the annular member being made of a material having a compressive strength of at least 0.5 GPa and having a thermal conductivity of less than about 4 watts per meter-Kelvin;
- and
- a high strength enclosure material over the annular ceramic member to form a high strength enclosure.
4 more elements
A method for operating a high pressure crystal growth apparatus, the method comprising:
- providing an apparatus for high pressure material processing, the apparatus comprising a cylindrical capsule having a first region and a second region, and a length defined between the first region and the second region, an annular heating member enclosing the capsule, a sleeve enclosing the annular heating member having predetermined thickness disposed continuously around the sleeve, and a high strength enclosure material disposed over the annular member;
- placing a baffle, nutrient, mineralizer, and a plurality of seed crystals within the capsule or liner;
- forming a gas-tight seal between each of regions of the cylindrical capsule or liner, the environment of the annular heating member, and the exterior of the apparatus;
- filling a predetermined fraction of the interior of the capsule or liner with a solvent and sealing the capsule or liner;
- filling one or more inert gases into the environment of the annular heating member;
- processing the cylindrical capsule or liner with a thermal energy to cause an increase in temperature within the capsule or liner to greater than 200 Degrees Celsius to cause the solvent to be heat to a superheated state;
- forming a crystalline material from a process of the superheated solvent;
- removing thermal energy from the cylindrical capsule or liner to cause a temperature of the liner to change from a first temperature to a second temperature, the second temperature being lower than the first temperature;
- removing the solvent from the capsule or liner;
- opening a top portion of the apparatus;
- exposing at least one region of the cylindrical capsule or liner;
- and
- removing the crystalline material.
10 more elements
Dependencies are inferred from the claim text.