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US 8,859,368 B2Granted
Semiconductor device incorporating a multi-function layer into gate stacks
AssigneeGlobalfoundries Inc.
InventorDerya Deniz
Life of this patent
Estimating the term…
Abstract
Approaches are provided for forming a semiconductor device (e.g., a FET) having a multi-function layer (e.g., niobium carbide (NbC)) that serves as a work function layer and a gate metal layer in gate stacks of solid state applications. By introducing a single layer with multiple functions, total number of layers that needs processing (e.g., recessing) may be decreased. As such, the complexity of device integration and resulting complications may be reduced.
Claims13
A method of forming a semiconductor device, comprising:
- applying a high-k dielectric layer and a work function (WF) layer over a p-FET portion and an n-FET portion of the device;
- removing the WF layer from over the n-FET portion;
- recessing the high-k dielectric layer and the WF layer over the p-FET portion and recessing the high-k dielectric layer over the n-FET portion;
- applying a multi-function layer over the p-FET portion and the n-FET portion;
- recessing the multi-function layer over the p-FET portion, resulting in exposure of a Portion of the high-k dielectric layer and a portion of the WF layer over the p-FET portion;
- recessing the multifunction layer over the n-FET portion, resulting in exposure of the high-k dielectric layer over the n-FET portion;
- and
- applying a cap layer into direct contact with the portion of the WF layer, the portion of the high-k dielectric layer, and a portion of the multi-function layer over the p-FET portion.
5 more elements
A method of forming a semiconductor device, comprising:
- applying a high-k dielectric layer and a work function (WF) metal layer over a p-FET portion and an n-FET portion of the semiconductor device;
- removing the WF metal layer from over the n-FET portion;
- recessing the high-k dielectric layer and the WF metal layer over the p-FET portion and the high-k dielectric layer over the n-FET portion;
- applying a glue layer over the WF metal layer of the p-FET portion and over the high-k layer of the n-FET portion;
- applying a multi-function layer comprising niobium carbide (NbC) over the glue layer of the p-FET portion and the n-FET portion;
- recessing the glue layer and the multifunction layer over the p-FET portion, resulting in exposure of a Portion of the high-k dielectric layer and a Portion of the WF metal layer over the p-FET portion;
- recessing the glue layer and the multifunction layer over the n-FET portion, resulting in exposure of a Portion of the high-k dielectric layer over the n-FET portion;
- and
- applying a cap layer into direct contact with a portion of the recessed glue layer, the portion of the high-k layer, the portion of the WF layer, and the portion of the multifunction layer over the p-FET portion.
6 more elements
Dependencies are inferred from the claim text.