Nozzle member and process for producing the same
AssigneesTokyo Electron Limited, Hokuriku Seikei Industrial Co., Ltd.
InventorsMasahiro Okesaku, Michito Miyahara
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AssigneesTokyo Electron Limited, Hokuriku Seikei Industrial Co., Ltd.
InventorsMasahiro Okesaku, Michito Miyahara
Estimating the term…
The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 μm to 100 μm, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.
A method of manufacturing a nozzle member which has a plurality of through holes having a shape of a straight line parallel to a center axis, the method comprising:
A method of manufacturing a nozzle member which has a plurality of through holes having a shape of a straight line parallel to a center axis, the method comprising:
Dependencies are inferred from the claim text.