Process for recovery of high boiling waste

A process comprising:

• a) combining a first process residue that contains compounds having more than one silicon atom and that contains a catalytic amount of an in-situ catalyst and a second process residue that contains compounds having more than one silicon atom and that does not contain a catalytic amount of an in-situ catalyst, where the second process residue is in an amount of at least 5 weight parts of the second process residue, per 100 weight parts of the first process residue;
• and
• b) contacting the product of step a) with hydrogen gas, thereby producing a product comprising a monosilane.