Substrate backing device and substrate thermocompression-bonding device

A substrate backing device for placing and holding a first substrate and for receiving, from therebelow, a pressing force during thermocompressively bonding a second substrate to the first substrate, the substrate backing device comprising:

• a base portion having an upper surface and a horizontal flat surface in the upper surface;
• and
• a backing plate having a lower surface and an upper surface parallel with the lower surface, and being adapted to be contacted, at the lower surface of the backing plate, with the horizontal flat surface of the base portion, and having, in the upper surface of the backing plate, a backing support surface adapted to come into contact with a lower surface of the first substrate for supporting the first substrate;
• wherein the backing support surface includes a holding flat-surface portion adapted to hold the lower surface of the first substrate placed on the backing plate, an opening portion which is shaped and positioned to encompass a compression bonding area of the first substrate placed on the opening portion which is to be compressively bonded to the second substrate, and a height reference portion which is provided adjacent to the opening portion and is adapted to restrict the first substrate in terms of a heightwise position of the first substrate,
• wherein the backing support surface is provided with a receiving member which is placed within the opening portion and is adapted to, during the thermocompression bonding, come into contact with the lower surface of the first substrate and with a component having been preliminarily mounted on the lower surface of the first substrate in an area coincident with the compression bonding area and, further, apply an upward supporting counterforce corresponding to the pressing force, and
• wherein the receiving member includes a resilient member which is adapted to exert an upward resilient force, which is induced when being pushed downwardly by the lower surface of the first substrate and the component which are in contact with an upper surface of the resilient member, as a supporting counterforce on the first substrate and on the component, and
• wherein the receiving member further includes a thickness adjustment member which is placed under the resilient member for adjusting a thickness of the entire receiving member.

A substrate backing device for placing and holding a first substrate and for receiving, from therebelow, a pressing force during thermocompressively bonding a second substrate to the first substrate, the substrate backing device comprising:

• a base portion having an upper surface and a horizontal flat surface in the upper surface;
• and
• a backing plate having a lower surface and an upper surface parallel with the lower surface, and being adapted to be contacted, at the lower surface of the backing plate, with the horizontal flat surface of the base portion, and having, in the upper surface of the backing plate, a backing support surface adapted to come into contact with a lower surface of the first substrate for supporting the first substrate;
• wherein the backing support surface includes a holding flat-surface portion adapted to hold the lower surface of the first substrate placed on the backing plate, an opening portion which is shaped and positioned to encompass a compression bonding area of the first substrate placed on the opening portion which is to be compressively bonded to the second substrate, and a height reference portion which is provided adjacent to the opening portion and is adapted to restrict the first substrate in terms of a heightwise position of the first substrate,
• wherein the backing support surface is provided with a receiving member which is placed within the opening portion and is adapted to, during the thermocompression bonding, come into contact with the lower surface of the first substrate and with a component having been preliminarily mounted on the lower surface of the first substrate in an area coincident with the compression bonding area and, further, apply an upward supporting counterforce corresponding to the pressing force, and
• wherein the opening portion has a cutout portion which communicates with an outside through a side surface of the backing plate at least in a single direction in a planar view, and this cutout portion is adapted to allow the receiving member to be attached and detached in a horizontal direction therethrough.