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US 8,822,879 B2Granted
Writing apparatuses and methods
AssigneeMycronic AB
InventorsLars Stiblert, Torbjörn Sandström, Jarek Luberek, Tomas Lock
Life of this patent
Estimating the term…
Abstract
Patterns are written on workpieces, such as, glass sheets and/or plastic sheets used in, for example, electronic display devices such as LCDs. The workpiece may be larger than about 1500 mm may be used. An optical writing head with a plurality of writing units may be used. The workpiece and the writing head may be moved relative to one another to provide oblique writing.
Claims14
A photolithography apparatus for patterning at least one workpiece, the apparatus comprising:
- a cylindrical holder for holding the at least one workpiece;
- and
- a rotor scanner for patterning the at least one workpiece, the rotor scanner including at least two writing units, wherein
- the rotor scanner is configured to move in an axial direction relative to the cylindrical holder and, concurrently with movement in the axial direction, rotate on an axis when patterning the at least one workpiece, the axis of rotation being substantially parallel to the axial movement of the rotor scanner,
- the rotor scanner is one of ring and disc-shaped, and
- the rotor scanner is configured to rotate relative to the cylindrical holder.
3 more elements
A photolithography apparatus for patterning at least one workpiece, the apparatus comprising:
- a cylindrical holder for holding the at least one workpiece;
- and
- a rotor scanner for patterning the at least one workpiece, the rotor scanner including at least one writing unit, each of the at least one writing unit including a spatial light modulator, the rotor scanner being configured to move in an axial direction relative to the cylindrical holder and configured to, concurrently with movement in the axial direction, rotate on an axis when patterning the at least one workpiece, a plane in which the rotor scanner rotates being substantially perpendicular to the axial direction, and the rotor scanner being configured to rotate relative to the cylindrical holder;
- wherein
- the rotor scanner is one of disc and ring shaped.
2 more elements
Dependencies are inferred from the claim text.