Deriving effective corners for complex correlations

Abstract

Systems and methods are described for simultaneously deriving an effective x-sigma corner for multiple, different circuit and/or process metrics for a semiconductor device. The result is an effective sigma that is representative of design intent. Some implementations account for covariance, and use joint probability as the criteria for the effective x-sigma corner (e.g., as opposed to a unique sigma level of each individual metric). Analysis results for each metric can be transformed to metric distributions in a common distribution framework, and a correlation matrix can be calculated. The transformed metric distributions can be input to a joint probability distribution set to achieve a target joint sigma level. The joint probability distribution and correlation matrix values can be used to back-calculate scaled x-sigma corners for each metric distribution. Simulation of the device can be performed at one or more of the scaled x-sigma corners.

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