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US 8,816,327 B2Granted
Nanowire efuses
AssigneeInternational Business Machines Corporation
InventorsJosephine B. Chang, Isaac Lauer, Chung-Hsun Lin, Jeffrey W. Sleight
Life of this patent
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Abstract
Electrically programmable fuses and methods for forming the same are shown that include forming a wire between a first pad and a second pad on a substrate, forming a blocking structure around a portion of the wire, and depositing a metal layer on the wire and first and second pads to form a metal compound, wherein the metal compound fully penetrates the portion of the wire within the blocking structure.
Claims1
An electrically programmable fuse, comprising:
- a conducting wire connecting a first pad and a second pad disposed at respective ends of the conducting wire, the conducting wire having a completely silicide cross-section, such that the entire cross-section is formed from silicide, where the first pad and second pad provide an external electrical connection to the wire;
- and
- a blocking structure formed around a full circumference of a portion of the wire, wherein the blocking structure comprises a spacer, wherein the completely silicide cross-section is within the region covered by the blocking structure, and wherein the conducting wire is disposed entirely within the blocking structure,
- wherein the conducting wire is configured to break by electro-migration into two regions so as to produce an electrical open when a threshold electrical signal is applied across the first and second pads.
1 more element
Dependencies are inferred from the claim text.