Stepping optical reduction system

A device comprising:

• a reduction optics assembly configured to receive a light array of selectable regions of light and dark areas, to reduce a size of the light array in two-dimensions, and to project a pattern of the light array reduced in size on a target surface;
• and
• a target assembly, the target assembly comprising
• a first stage mounted between the target surface and the reduction optics assembly, the first stage comprising a first peripheral edge forming a first hole through the first stage through which the pattern is projected onto the target surface;
• a first motor connected to control movement of the first stage to move the target surface in at least two directions in plane with the projected pattern with a first precision;
• a second stage mounted between the target surface and the reduction optics assembly and further mounted to the first stage so that the first stage and the second stage do not move relative to each other, the second stage comprising a second peripheral edge forming a second hole through the second stage through which the pattern is projected onto the target surface;
• and
• a second motor connected to control movement of the second stage to move the target surface in the at least two directions in plane with the projected pattern with a second precision that is smaller than the first precision.