High spatial resolution non-contact temperature measurement
AssigneeRensselaer Polytechnic Institute
InventorsXiaowei Wu, Robert Hull
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Abstract
Systems, methods, and computer-readable media for temperature measurement of a sample, using new temperature measurement and mapping techniques, are provided. The technique employs a temperature sensitive electron signal in a scanning electron microscope (SEM) and provides both high spatial resolution and non-contact temperature measurement capabilities. An electron beam of the SEM can be initiated to interact with a sample, and a temperature sensitive signal can be collected from the sample and analyzed.
Claims20
A computer-readable medium having computer-executable instructions for performing a method comprising:
- initiating an electron beam of a scanning electron microscope (SEM) to interact with a sample;
- collecting a temperature sensitive signal from the sample using an electron backscatter diffraction (EBSD) detector after initiating the electron beam;
- and
- analyzing the temperature sensitive signal to determine a temperature of the sample.
A method of measuring a temperature of a sample, comprising:
- initiating an electron beam of a scanning electron microscope (SEM) to interact with the sample;
- obtaining a temperature sensitive signal from the sample using an electron backscatter diffraction (EBSD) detector after the interaction with the sample;
- and
- analyzing the temperature sensitive signal to determine a temperature of the sample,
- wherein the temperature determination has a high spatial resolution, and
- wherein no physical contact is made, during the initiation of the electron beam or while the temperature sensitive signal is obtained, between the SEM and a region of the sample from where the temperature sensitive signal is obtained.
Dependencies are inferred from the claim text.