Coating device
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsFutoshi Shimai, Tsutomu Sahoda, Akihiko Sato, Kenji Maruyama
Life of this patent
Estimating the term…
Abstract
Provided is a coating device including: a rotating part which rotatably holds a substrate while the substrate is upright; a cup portion disposed to surround an outer periphery of the substrate held by the rotating part and having an opening which exposes a first surface and a second surface of the substrate; a coating part which includes a nozzle ejecting a liquid material to the first surface and to the second surface of the substrate through the opening; and a cover portion which is provided on the first surface and the second surface sides of the substrate and by which the opening is opened and closed.
Claims10
A coating device comprising:
- a rotating part which rotatably holds a substrate while the substrate is upright;
- a cup portion disposed to surround an outer periphery of the substrate held by the rotating part and having an opening which exposes a first surface and a second surface of the substrate;
- a coating part which includes a nozzle ejecting a liquid material to the first surface and to the second surface of the substrate through the opening;
- and
- a cover portion which is provided to face the first and second faces of the substrate, wherein the cover portion is configured to open the opening so as to expose the first and second faces of the substrate, and to close the opening so as to cover the first and second faces of the substrate.
Dependencies are inferred from the claim text.