Multi-layer diaphragm
AssigneeCkd Corporation
InventorsShinichi Nitta, Hiroshi Itafuji
Life of this patent
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Abstract
This invention provides a multi-layer diaphragm which is for use in fluid devices and has excellent maintainability in addition to both operability and pressure resistance. This multi-layer diaphragm is provided with a first and second plate and with an elastic adhesive layer which binds together the first and second metal plates. The elastic adhesive layer has an elastic layer that is elastic in a direction which offsets the first and second metal plates from one another in the in-plane direction. The multi-layer diaphragm is provided with a metal mounting plate which, provided in a position allowing protrusion beyond the first and second metal plates in the outer edge direction, has a mounting unit for mounting to the fluid device.
Claims12
A multi-layer diaphragm configured to be attached to a fluid device having an actuator to apply a driving force to the multi-layer diaphragm, the multi-layer diaphragm comprising:
- a first metallic plate configured to be deformed and displaced in a thickness direction thereof by the driving force applied from a first side thereof;
- a second metallic plate provided on a second side of the first metallic plate opposite to the first side, the second metallic plate being configured to be deformed and displaced in a thickness direction thereof in accordance with deformation and displacement of the first metallic plate;
- an elastic adhesion layer provided between and in contact with the first and second metallic plates so as to adhere the first and second metallic plates, wherein the elastic adhesion layer having elasticity in a direction of an in-plane displacement of the first and second metallic plates relative to each other;
- and
- a metallic attachment plate, the attachment plate having an attachment portion configured to be attached to the fluid device, the attachment portion projecting outwardly from an outer edge of the first and second metallic plates.
Dependencies are inferred from the claim text.