High-precision micro/nano-scale machining system
AssigneeThe Board of Trustees of the University of Illinois
InventorsShiv G. Kapoor, Keith Allen Bourne, Richard E. DeVor
Life of this patent
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Abstract
A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.
Claims18
A high precision micro/nano scale machining system, comprising:
- a multi-axis movement machine providing relative movement along multiple axes between a workpiece and a tool holder;
- a cutting tool on a flexible cantilever held by the tool holder;
- the tool holder being movable to provide at least two of the axes to set an angle and distance of the cutting tool relative to the workpiece;
- and
- a feedback control system that uses measurement of deflection of the cantilever during cutting to set and maintain a desired cantilever deflection and hence a desired load on the cutting tool.
A high precision micro/nano scale machining system comprising:
- a single or multiple point cutting tool mounted on a flexible cantilever, the cutting tool having a geometry suitable for groove and pocket cutting;
- a precision displacement sensor to measure deflection of the cantilever during cutting;
- a multi-axis motion platform providing relative x, y, and z axis movements and rotational movements between a workpiece and the cutting tool;
- and
- a feedback control system that uses measurement of tool cantilever deflection during cutting to set and maintain a constant cantilever deflection and hence a constant load on the cutting tool.
A high precision micro/nanoscale machining system comprising:
- a single or multiple point cutting tool mounted on a flexible cantilever, the cutting tool having a geometry suitable for groove and pocket cutting;
- a precision displacement sensor to measure deflection of the cantilever during cutting;
- a multi-axis motion platform providing relative x, y, and z axis movements and rotational movements between a workpiece and the cutting tool;
- and
- a feedback control system that uses measurement of tool cantilever deflection during cutting to maintain a constant cantilever deflection and hence a constant load on the cutting tool, wherein the feedback control system uses a 2D beam model to calculate the amount of rotation required to achieve a desired cutting orientation by accounting for loads applied to the tool normal to the workpiece and the tool geometry.
A method of machining a workpiece comprising:
- placing the workpiece on a multi-axis movement machine that provides relative movement along multiple axes between a workpiece and a tool holder;
- positioning a cutting tool on a flexible cantilever held by the tool holder towards the workpiece, the tool holder being movable to provide at least two of the axes to set an angle and distance of the cutting tool relative to the workpiece;
- contacting the cutting tool to the workpiece, wherein a load is provided on the cutting tool and the flexible cantilever is deflected;
- moving at least one of said cutting tool and said workpiece to machine the workpiece;
- during said moving, measuring deflection of the cantilever;
- and
- repositioning the tool holder based on said measured deflection to maintain a desired cantilever deflection and hence a desired load on the cutting tool.
A high precision micro/nano scale machining system, comprising:
- means for microscale or nanoscale cutting;
- flexible cantilever means for supporting said means for cutting;
- means for holding said flexible cantilever means;
- means for providing relative movement along multiple axes between a workpiece and said means for holding;
- said means for providing relative movement comprising means for setting an angle and distance of said means for cutting relative to the workpiece;
- means for measuring deflection of said flexible cantilever means;
- and
- feedback control mean for receiving said measured deflection and for setting and maintaining a desired deflection of said flexible cantilever means and hence a desired load on said means for cutting.
Dependencies are inferred from the claim text.