Method of forming a piezoelectric actuator of an inkjet head

A method of fabricating a piezoelectric actuator usable in an inkjet head, the method comprising:

• forming a lower electrode formed on a vibration plate;
• forming a piezoelectric layer on the lower electrode;
• and
• forming an upper electrode having a first portion disposed on the piezoelectric layer and a second portion extended from the first portion in a first direction, the first portion having a first width in a second direction perpendicular to the first direction, and the second portion having a second width wider than the first width in the second direction.

A method of fabricating an inkjet head usable in an image forming apparatus, the method comprising:

• forming an ink flow structure having a flow channel plate and a nozzle plate disposed on a first side of the flow channel plate to form a pressure chamber;
• and
• forming a piezoelectric actuator having a vibration plate disposed on a second side of the flow channel plate, a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to the pressure chamber, a supporting pad formed on the lower electrode and contacting one end of the piezoelectric layer to be extended away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad,
• wherein the upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit.