Substrate processing apparatus

A recipe editing method performed on a substrate processing apparatus comprising the steps of:

• displaying an editing screen for compiling or editing the recipe on the apparatus by setting at least one control parameter among control parameters containing a pressure and a processing gas flow;
• controlling the apparatus to carry out the following processes when a time set in advance elapses without an operation being carried out on the displayed editing screen in an event of setting at least the control parameter, compiling or editing the recipe:
• (1) a process that switches from the editing screen to a prescribed screen which differs from the editing screen, deletes the recipe partway through the editing that is compiled or edited by the operation by the time set in advance, and saves the control parameter that is set by the operation by the time set in advance, while returning to an original recipe before the compiling or the editing, when a save and finish button displayed on the editing screen is pressed by the time set in advance, (2) a process that switches to an initial screen, and (3) a process that saves the recipe partway through the editing;
• switching from the editing screen to the prescribed screen and carrying out a logging out process;
• and
• switching from the editing screen to an initial screen that includes designation devices for carrying out a change of an operating authority and a logging in process.

A method for manufacturing a semiconductor device comprising the steps of:

• displaying an editing screen for compiling or editing a recipe on the device by setting at least one control parameter among control parameters containing a pressure and a processing gas flow;
• carrying out the following processes when a time set in advance elapses without an operation being carried out on the displayed editing screen in an event of setting at least the control parameter, compiling or editing the recipe:
• (1) a process that switches from the editing screen to an initial screen that includes designation devices for carrying out a change of an operating authority and a logging in process;
• deletes the recipe partway through the editing that is compiled or edited by the operation by the time set in advance, and saves the control parameter that is set by the operation by the time set in advance, while returning to an original recipe before the compiling or the editing, when a save and finish button displayed on the editing screen is pressed by the time set in advance, (2) a process that switches to the initial screen, and (3) a process that saves the recipe partway through the editing when the logging in process is carried out via the designation devices on the initial screen;
• and (4) a process that processes a substrate by carrying out the original recipe before compiling or editing, or processes the substrate by carrying out the saving recipe partway through the editing, or processes the substrate by carrying out the recipe partway through the editing that inputted the saving control parameter to the original recipe;
• switching from the editing screen to the prescribed screen and carrying out a logging out process;
• and
• switching from the editing screen to an initial screen that includes designation devices for carrying out a change of an operating authority and a logging in process.