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US 8,805,127 B2Granted
Optical waveguide device, manufacturing method therefor, optical modulator, polarization mode dispersion compensator, and optical switch
AssigneeFujitsu Limited
InventorsTetsuya Miyatake, Takashi Shiraishi, Masaharu Doi
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Abstract
An optical waveguide device includes: a substrate which has an electro-optical effect; an optical waveguide which is formed on the substrate and/or inside the substrate; and an in-substrate electrode which is formed of a metal and provided inside the substrate.
Claims3
A method comprising:
- forming an optical waveguide on a substrate and/or inside the substrate, the substrate having an electro-optical effect;
- forming an in-substrate electrode of metal inside the substrate;
- arranging a signal electrode over the optical waveguide;
- and
- arranging a ground electrode over a first surface of the substrate and separated by a distance from the signal electrode;
- forming a via hole;
- and
- creating a connection between the ground electrode and the in-substrate electrode through a via-hole provided in the substrate.
5 more elements
Dependencies are inferred from the claim text.