Method for adjusting spectral line width of narrow-band laser

A narrow-band laser spectral line width adjustment method for adjusting the spectral line width of laser light emitted from a narrow-band laser device being used as a light source for semiconductor exposure, the method comprising:

• performing maintenance on the narrow-band laser device;
• setting in advance an upper limit and a lower limit for a spectral line width allowed in semiconductor exposure;
• after said maintenance and said setting the upper limit and lower limit for the spectral line width, and before semiconductor exposure, emitting the laser light from the narrow-band laser device;
• after said emitting the laser light and before semiconductor exposure, detecting the spectral line width of the laser light using a monitor module arranged on an optical path of the laser light;
• and
• after said detecting the spectral line width of the laser light and before semiconductor exposure, adjusting, based on the detected spectral line width, a distance between a cylindrical concave lens and a cylindrical convex lens arranged on an optical path at a front side inside a resonator of the narrow-band laser device by using a micrometer to set the spectral line width to a value between the upper limit and the lower limit.

A narrow-band laser spectral line width adjustment method for adjusting the spectral line width of laser light emitted from a narrow-band laser device being used as a light source for semiconductor exposure, the method comprising:

• assembling the narrow-band laser device;
• setting in advance an upper limit and a lower limit for a spectral line width allowed in semiconductor exposure;
• after said assembling and said setting the upper limit and the lower limit, and before semiconductor exposure, emitting the laser light from the narrow-band laser device;
• after said emitting the laser light and before semiconductor exposure, detecting the spectral line width of the laser light using a monitor module arranged on an optical path of the laser light;
• and
• after said detecting the spectral line width of the laser light and before semiconductor exposure, adjusting, based on the detected spectral line width, a distance between a cylindrical concave lens and a cylindrical convex lens arranged on the optical path at a front side inside a resonator of the narrow-band laser device by using a micrometer to set the spectral line width to a value between the upper limit and the lower limit.