Optical angle-measuring device with combined radial-circular grating
AssigneeDr. Johannes Heidenhain GmbH
InventorWolfgang Holzapfel
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AssigneeDr. Johannes Heidenhain GmbH
InventorWolfgang Holzapfel
Estimating the term…
In an optical angle-measuring device for ascertaining the relative movement between at least one scanning grating and a graduated disk having at least one measuring graduation, the scanning grating is in the form of a linear scanning grating, and the graduated disk includes a first and a second combined radial-circular grating as measuring graduation, and has a mirror. An incident beam of rays is initially split at the scanning grating into two partial beams of rays that then propagate in the direction of the first combined radial-circular grating and are diffracted there, then propagate in the direction of the mirror and are reflected there in the direction of the second combined radial-circular grating, subsequently propagate in the direction of the second combined radial-circular grating and are diffracted there, and then propagate in the direction of the scanning grating, where a superposition of the partial beams of rays results.
An optical angle-measurement device adapted to ascertain a relative movement between the scanning grating and the graduated disk device, comprising:
Dependencies are inferred from the claim text.