Semiconductor device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsMasayuki Sakakura, Hideto Ohnuma, Hideaki Kuwabara
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsMasayuki Sakakura, Hideto Ohnuma, Hideaki Kuwabara
Estimating the term…
It is an object of the present invention to provide a method for preventing a breaking and poor contact, without increasing the number of steps, thereby forming an integrated circuit with high driving performance and reliability. The present invention applies a photo mask or a reticle each of which is provided with a diffraction grating pattern or with an auxiliary pattern formed of a semi-translucent film having a light intensity reducing function to a photolithography step for forming wires in an overlapping portion of wires. And a conductive film to serve as a lower wire of a two-layer structure is formed, and then, a resist pattern is formed so that a first layer of the lower wire and a second layer narrower than the first layer are formed for relieving a steep step.
A semiconductor device, comprising:
A semiconductor device, comprising:
A display device, comprising:
Dependencies are inferred from the claim text.