Electromechanical systems device
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorsTsongming Kao, Charles Leu, Kostadin Djordjev, Rihui He
Life of this patent
Estimating the term…
Abstract
This disclosure provides systems, methods and apparatus for EMS devices. In one aspect, an EMS device includes an array of display elements and a plurality of driver lines with at least a portion of the plurality of driver lines routed above or below the array between one or more driver circuits and the array. In some implementations, at least a portion of the plurality of driver lines is disposed above a non-active area of the array. In one aspect, an EMS device can form a portion of at least one of the plurality of driver lines. In some implementations, movable layers of the array can be disposed between at least a portion of the plurality of driver lines and stationary electrodes of the display.
Claims24
An apparatus comprising:
- an array of display elements defining an array footprint, the array of display elements including:
- a plurality of movable layers extending in a first direction and a plurality of stationary electrodes extending in a second direction, the plurality of movable layers and stationary electrodes forming a portion of a plurality of the display elements;
- a plurality of electrical connection pads, each connection pad disposed at an end of a movable layer;
- and
- a plurality of driver lines each having a first end connected to a connection pad and a second end connectable to a driver circuit,
- wherein at least a portion of the plurality of driver lines is routed within the array footprint above or below the array of display elements.
An apparatus comprising:
- an array of display elements defining an array footprint, the array of display elements including:
- a plurality of movable layers extending in a first direction and a plurality of stationary electrodes extending in a second direction, the plurality of movable layers and stationary electrodes forming a portion of a plurality of the display elements;
- a plurality of electrical connection pads, each connection pad disposed at an end of a movable layer;
- and
- a plurality of means for electrically connecting each of the plurality of movable layers to a driver circuit, each electrical connection means being electrically connected to a connection pad and connectable to a driver circuit,
- wherein at least a portion of the plurality of electrical connection means is routed within the array footprint above or below the array of display elements.
A method of manufacturing an apparatus, comprising:
- forming an array of display elements defining an array footprint, wherein forming the array of display elements includes:
- forming a plurality of movable layers extending in a first direction and a plurality of stationary electrodes extending in a second direction;
- forming an electrical connection pad at an end of each movable layer;
- and
- forming a plurality of driver lines each having a first end connected to a connection pad and a second end connectable to a driver circuit, wherein at least a portion of the driver lines passes within the array footprint above or below the array of display elements.
Dependencies are inferred from the claim text.