Semiconductor device semiconductor device testing method, and data processing system

A testing method of a semiconductor device comprising:

• providing the semiconductor device that includes a core chip including a plurality of through electrodes penetrating therethrough and an interface chip stacked on the core chip, the through electrodes constitute a first signal line, a measurement-target signal line, and a reference signal line that are connected between the core chip and the interface chip, respectively;
• outputting a test clock having a predetermined cycle from the interface chip to the first signal line;
• generating a measurement signal in the core chip in synchronization with the test clock supplied via the first signal line and outputting the measurement signal to the measurement-target signal line and the reference signal line in a simultaneous manner;
• and
• detecting a phase difference of a plurality of the measurement signals on the interface chip respectively supplied via the measurement-target signal line and the reference signal line.