Power supply apparatus for test apparatus

A power supply apparatus for a test apparatus, configured to supply a power supply voltage to a device under test, the power supply apparatus comprising:

• a voltage source configured to generate the power supply voltage stabilized such that its voltage level matches a voltage level that corresponds to a reference voltage, and to supply the power supply voltage thus generated to the device under test;
• a current detection circuit configured to generate a detection voltage that corresponds to an output current that flows through the device under test;
• and
• a reference voltage generating circuit configured to receive an input voltage and the detection voltage, and to generate the reference voltage,
• wherein, with the component of the reference voltage that corresponds to the detection voltage as VREF′, the reference voltage generating circuit is configured to provide a transfer function H(s) represented by VREF′=H(s)×Vm=(K1−K2/(1+s·K3))×Vm, where Vm represents the detection voltage, and K1, K2, and K3 each represent a coefficient.

A power supply apparatus for a test apparatus, configured to supply a power supply voltage to a device under test, the power supply apparatus comprising:

• a voltage source configured to generate the power supply voltage stabilized such that its voltage level matches a voltage level that corresponds to a reference voltage, and to supply the power supply voltage thus generated to the device under test;
• a current detection circuit configured to generate a detection voltage that corresponds to an output current that flows through the device under test;
• and
• a reference voltage generating circuit configured to generate the reference voltage,
• wherein the voltage source comprises:
• an operational amplifier configured to receive a feedback voltage corresponding to the power supply voltage and the reference voltage;
• and
• a buffer configured to receive an output voltage of the operational amplifier and to output the power supply voltage,
• and wherein the reference voltage generating circuit comprises an A/D converter configured to convert the detection voltage into a digital detection value, a signal processing unit configured to perform signal processing on the digital detection value so as to generate a digital reference value that corresponds to the reference voltage, and a D/A converter configured to convert the digital reference value into the reference voltage in the form of an analog signal,
• and wherein the signal processing unit is configured to generate the digital reference value such that, in the initial state, the digital reference value is set to an initial level, and such that, after the output current flows, the digital reference value transits to a first level obtained by shifting the initial level by a first step that corresponds to the digital detection value, following which it transits to a second level obtained by shifting the initial level by a second step that corresponds to the digital detection value.

A test apparatus comprising a power supply apparatus configured to supply electric power to a device under test, wherein the power supply apparatus comprises:

• a voltage source configured to generate the power supply voltage stabilized such that its voltage level matches a voltage level that corresponds to a reference voltage, and to supply the power supply voltage thus generated to the device under test;
• a current detection circuit configured to generate a detection voltage that corresponds to an output current that flows through the device under test;
• and
• a reference voltage generating circuit configured to generate the reference voltage according to an input voltage and the detection voltage,
• wherein the voltage source comprises:
• an operational amplifier configured to receive a feedback voltage corresponding to the power supply voltage and the reference voltage;
• and
• a buffer configured to receive an output voltage of the operational amplifier and to output the power supply voltage,
• and wherein the reference voltage generating circuit is configured to generate the reference voltage such that, in an initial state, the reference voltage is set to an initial voltage level that corresponds to the input voltage, and such that, after the output current flows, the reference voltage transits to a first voltage level obtained by shifting the initial voltage level by a first voltage step that corresponds to the detection voltage, following which the reference voltage transits to a second voltage level obtained by shifting the initial voltage level by a second voltage step that corresponds to the detection voltage.

A test apparatus comprising a power supply apparatus configured to supply electric power to a device under test, wherein the power supply apparatus comprises:

• a voltage source configured to generate the power supply voltage stabilized such that its voltage level matches a voltage level that corresponds to a reference voltage, and to supply the power supply voltage thus generated to the device under test;
• a current detection circuit configured to generate a detection voltage that corresponds to an output current that flows through the device under test;
• and
• a reference voltage generating circuit configured to receive an input voltage and the detection voltage, and to generate the reference voltage,
• wherein, with the component of the reference voltage that corresponds to the detection voltage as VREF′, the reference voltage generating circuit is configured to provide a transfer function H(s) represented by VREF′=H(s)×Vm=(K1−K2/(1+s·K3))×Vm, where Vm represents the detection voltage, and K1, K2, and K3 each represent a coefficient.

A test apparatus comprising a power supply apparatus configured to supply electric power to a device under test, wherein the power supply apparatus comprises:

• a voltage source configured to generate the power supply voltage stabilized such that its voltage level matches a voltage level that corresponds to a reference voltage, and to supply the power supply voltage thus generated to the device under test;
• a current detection circuit configured to generate a detection voltage that corresponds to an output current that flows through the device under test;
• and
• a reference voltage generating circuit configured to generate the reference voltage,
• wherein the voltage source comprises:
• an operational amplifier configured to receive a feedback voltage corresponding to the power supply voltage and the reference voltage;
• and
• a buffer configured to receive an output voltage of the operational amplifier and to output the power supply voltage,
• and wherein the reference voltage generating circuit comprises an A/D converter configured to convert the detection voltage into a digital detection value, a signal processing unit configured to perform signal processing on the digital detection value so as to generate a digital reference value that corresponds to the reference voltage, and a D/A converter configured to convert the digital reference value into the reference voltage in the form of an analog signal,
• and wherein the signal processing unit is configured to generate the digital reference value such that, in the initial state, the digital reference value is set to an initial level, and such that, after the output current flows, the digital reference value transits to a first level obtained by shifting the initial level by a first step that corresponds to the digital detection value, following which it transits to a second level obtained by shifting the initial level by a second step that corresponds to the digital detection value.