RF/VHF impedance matching, 4 quadrant, dual directional coupler with V RMS/IRMS responding detector circuitry
AssigneeComet Technologies USA, Inc.
InventorGerald E. Boston
Life of this patent
Estimating the term…
Abstract
A physical vapor deposition system may include an RF generator configured to transmit an AC process signal to a physical vapor deposition chamber via an RF matching network. A detector circuit may be configured to sense the AC process signal and output a DC magnitude error signal and a DC phase error signal. A controller may be coupled to the detector circuit and the RF matching network and configured to receive the DC magnitude and phase error signals and to vary an impedance of the RF matching network in response to the DC magnitude and phase error signals.
Claims20
A physical vapor deposition system, comprising:
- an RF generator configured to transmit an AC process signal to a physical vapor deposition chamber via an RF matching network;
- a rod coupled to the RF generator and configured to sense the AC process signal generated by the RF generator;
- a first converter coupled to the rod and configured to receive a first AC voltage signal from the rod and to output a DC voltage magnitude signal;
- a second converter coupled to the rod and configured to receive a first AC current signal from the rod and to output a DC current magnitude signal;
- a multiplier coupled to the first and second converters and configured to receive the DC voltage and current magnitude signals and to output a DC magnitude error signal;
- a phase detector coupled to the rod and configured to receive a second AC voltage signal and a second AC current signal from the rod and to output a DC phase difference signal, wherein the DC phase difference signal is converted into a DC phase error signal;
- and
- a controller coupled to the multiplier, the phase detector, and the RF matching network and configured to receive the DC magnitude and phase error signals and to vary an impedance of the RF matching network in response to the DC magnitude and phase error signals.
A method for varying an impedance of an RF matching network in a physical vapor deposition system, comprising:
- transmitting an AC process signal from an RF generator to a physical vapor deposition chamber via the RF matching network;
- sensing the AC process signal generated by the RF generator with a rod coupled to the RF generator;
- converting a first AC voltage signal from the rod to a DC voltage magnitude signal with a first converter;
- converting a first AC current signal from the rod to a DC current magnitude signal with a second converter;
- converting the DC voltage and current magnitude signals to a DC magnitude error signal with a multiplier coupled to the first and second converters;
- converting second AC voltage and current signals from the rod to a DC phase difference signal with a phase detector, wherein the DC phase difference signal is converted into a DC phase error signal;
- and
- varying the impedance of the RF matching network with a controller in response to the DC magnitude and phase error signals.
A detector circuit for a physical vapor deposition system, comprising:
- a rod configured to sense an AC process signal transmitted from an RF generator to a physical vapor deposition chamber;
- a first converter coupled to the rod and configured to receive a first AC voltage signal from the rod and to output a DC voltage magnitude signal;
- a second converter coupled to the rod and configured to receive a first AC current signal from the rod and to output a DC current magnitude signal;
- a multiplier coupled to an output of the first and second converters and configured to receive the DC voltage and current magnitude signals and to output a DC magnitude error signal;
- and
- a phase detector coupled to the rod and configured to receive a second AC voltage signal and a second AC current signal from the rod and to output a DC phase difference signal, wherein the DC phase difference signal is converted into a DC phase error signal;
- wherein at least one of the first converter, the second converter, the multiplier, and the phase detector comprises a telecommunications integrated circuit.
Dependencies are inferred from the claim text.