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US 8,803,405 B2Granted
Ultrasonic transducer, biological sensor, and method for manufacturing an ultrasonic transducer
AssigneeSeiko Epson Corporation
InventorsTomoaki Nakamura, Hironori Suzuki
Life of this patent
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Abstract
An ultrasonic transducer includes a resin substrate, a support film and a piezoelectric element. The resin substrate has an opening. The support film blocks off the opening in the resin substrate. The piezoelectric element is disposed on the support film in a region that blocks off the opening in plan view from a thickness direction of the support film. The piezoelectric element includes a lamination of a lower electrode, a piezoelectric body, and an upper electrode.
Claims5
An ultrasonic transducer comprising:
- a resin substrate having an opening;
- a support film that blocks off the opening in the resin substrate;
- and
- a piezoelectric element disposed on the support film in a region that blocks off the opening in plan view from a thickness direction of the support film, the piezoelectric element including a lamination of a lower electrode, a piezoelectric body, and an upper electrode.
1 more element
Dependencies are inferred from the claim text.