Inter-digital bulk acoustic resonator

An inter-digital bulk acoustic resonator, comprising:

• a first resonating structure, comprising:
• a plurality of resonating beams and a coupling beam, wherein the plurality of resonating beams are respectively connected at two opposite sides of the coupling beam, and the resonating beams are perpendicular to the coupling beam;
• one or more electrodes, disposed between two adjacent resonating beams, and respectively forming capacitor gaps with the two resonating beams, wherein the electrodes drive the two adjacent resonating beams to vibrate or sense a capacitance variation generated due to vibration of the two adjacent resonating beams, and the electrodes and the resonating beams are disposed in parallel;
• a second resonating structure, comprising:
• a plurality of resonating beams and a coupling beam, wherein the plurality of resonating beams are symmetrically connected at two opposite sides of the coupling beam respectively, and the resonating beams are perpendicular to the coupling beam;
• one or more electrodes, disposed between two adjacent resonating beams, and respectively forming capacitor gaps with the two resonating beams, wherein the electrodes drive the two adjacent resonating beams to vibrate or sense a capacitance variation generated due to vibration of the two adjacent resonating beams, and the electrodes and the resonating beams are disposed in parallel;
• a substrate;
• and
• a supporting structure, disposed on the substrate, wherein the coupling beam or the first and the second resonating structures are supported on the substrate.