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US 8,803,314 B2Granted
Hermetic packaging of integrated circuit components
AssigneeRaytheon Company
InventorsPremjeet Chahal, Francis J. Morris
Life of this patent
Estimating the term…
Abstract
A method for forming an integrated circuit includes transforming at least a portion of a first substrate layer to form a conductive region within the first substrate layer. An integrated circuit device is provided proximate an outer surface of the first substrate layer. The integrated circuit device transmits or receives electrical signals through the conductive region. A second substrate layer is disposed proximate to the outer surface of the first substrate layer to enclose the integrated circuit device in a hermetic environment.
Claims15
A hermetically-packaged integrated circuit,
- an integrated circuit device positioned proximate an outer surface of a first substrate layer;
- a conductive region operable to transfer electrical signals to or from the integrated circuit device, the conductive region comprising a portion of material of the first substrate layer that has been changed to exhibit conductive properties;
- a metal contact formed proximate the outer surface of the first substrate layer;
- a via formed through a portion of the first substrate layer to expose an underside surface of the conductive region;
- at least one conductive layer at least partially filling the via;
- and
- a second substrate layer disposed proximate the outer surface of the first substrate layer to enclose the integrated circuit device in a hermetic environment;
- wherein the conductive region comprises a silicide material diffused into the first substrate layer, the silicide layer formed by a reaction between a metal layer formed on the outer surface of the first substrate layer and the material of the first substrate layer.
5 more elements
A hermetically-packaged integrated circuit, comprising:
- an integrated circuit device positioned proximate an outer surface of a first substrate layer;
- a conductive region operable to transfer electrical signals to or from the integrated circuit device, the conductive region comprising a portion of material of the first substrate layer that has been changed to exhibit conductive properties;
- a metal contact formed proximate the outer surface of the first substrate layer;
- a via formed through a portion of the first substrate layer to expose an underside surface of the conductive region;
- at least one conductive layer at least partially filling the via;
- and
- a second substrate layer disposed proximate the outer surface of the first substrate layer to enclose the integrated circuit device in a hermetic environment;
- wherein the conductive region comprises a doped region within the first substrate layer, the doped region formed with a dopant selected from the group consisting of Antimony (Sb), Arsenic (As), Boron (B), and Phosphorus (P).
5 more elements
A method for forming a hermetically-packaged integrated circuit, comprising:
- forming a conductive region by transforming a portion of material of a first substrate layer such that portion of material of the first substrate layer is changed to exhibit conductive properties, wherein the transforming comprises diffusing a silicide material into the first substrate layer, the silicide layer formed by a reaction between a metal layer formed on the outer surface of the first substrate layer and the material of the first substrate layer;
- providing an integrated circuit device proximate an outer surface of the first substrate layer, the integrated circuit device operable to transmit or receive electrical signals through the conductive region;
- after forming the conductive region in the substrate layer, forming a metal contact proximate the outer surface of the first substrate layer;
- using an etch process on an underside surface of the substrate layer to form a via through a portion of the first substrate layer to expose an underside surface of the conductive region;
- at least partially filling the via with at least one conductive layer;
- and
- disposing a second substrate layer proximate to the outer surface of the first substrate layer to enclose the integrated circuit device in a hermetic environment.
4 more elements
A method for forming a hermetically-packaged integrated circuit, comprising:
- forming a conductive region by transforming a portion of material of a first substrate layer such that portion of material of the first substrate layer is changed to exhibit conductive properties;
- wherein transforming the portion of the material of the first substrate layer further comprises:
- depositing a dopant on an outer surface of the first substrate layer, wherein the dopant is selected from the group consisting of Antimony (Sb), Arsenic (As), Boron (B), and Phosphorus (P);
- and
- annealing the first substrate layer to cause the dopant to diffuse into the first substrate layer to form the conductive region;
- providing an integrated circuit device proximate the outer surface of the first substrate layer, the integrated circuit device operable to transmit or receive electrical signals through the conductive region;
- after forming the conductive region in the substrate layer, forming a metal contact proximate the outer surface of the first substrate layer;
- using an etch process on an underside surface of the substrate layer to form a via through a portion of the first substrate layer to expose an underside surface of the conductive region;
- at least partially filling the via with at least one conductive layer;
- and
- disposing a second substrate layer proximate to the outer surface of the first substrate layer to enclose the integrated circuit device in a hermetic environment.
8 more elements
A method for forming a hermetically-packaged integrated circuit, comprising:
- forming a conductive region by transforming a portion of material of a first substrate layer such that portion of material of the first substrate layer is changed to exhibit conductive properties, wherein the transforming comprises diffusing a silicide material into the first substrate layer, the silicide layer formed by a reaction between a metal layer formed on the outer surface of the first substrate layer and the material of the first substrate layer;
- and
- after forming the conductive region within the substrate layer, forming a metal contact proximate an outer surface of the first substrate layer;
- using an etch process on an underside surface of the substrate layer to form a via through a portion of the first substrate layer to expose an underside surface of the conductive region;
- at least partially filling the via with at least one conductive layer;
- and
- mating the substrate layer with a surface of an integrated circuit device to create a hermetic environment between the surface of the integrated circuit device and the substrate layer, the integrated circuit device operable to transmit or receive electrical signals through the conductive region.
4 more elements
Dependencies are inferred from the claim text.