Back to results
US 8,803,296 B2Granted
Coatings for relatively movable surfaces
AssigneeTexas Instruments Incorporated
InventorsWilliam Robert Morrison, Mark Christopher Fisher, Murali Hanabe, Ganapathy Subramaniam Sivakumar, Simon Joshua Jacobs
Life of this patent
Estimating the term…
Abstract
A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
Claims24
A device comprising:
- a microelectromechanical system (MEMS) component comprising a surface;
- and
- a coating disposed on at least a portion of the surface, wherein the coating comprises a compound of the formula M(CnF2n+1Or), wherein M comprises a polar head group, and wherein n≧2r.
A device comprising:
- a MEMS component or semiconductor component comprising a surface;
- and
- a coating disposed on the surface, wherein the coating comprises a compound comprising a hydrophilic head group bound to a hydrophobic tail, wherein the hydrophobic tail comprises a fluorinated carbon chain and at least one ether functional group disposed within the fluorinated carbon chain.
Dependencies are inferred from the claim text.