Magnetic memory layer and magnetic memory device including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsWoo-chang Lim, Young-hyun Kim, Jun-ho Jeong, Hee-ju Shin
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Abstract
A magnetic memory layer and a magnetic memory device including the same, the magnetic memory layer including a first seed layer; a second seed layer on the first seed layer, the second seed layer grown according to a <002> crystal direction with respect to a surface of the first seed layer; and a main magnetic layer on the second seed layer, the main magnetic layer grown according to the <002> crystal direction with respect to a surface of the second seed layer.
Claims20
A magnetic memory layer, comprising:
- a base layer;
- a first seed layer on the base layer;
- a second seed layer above and directly on the first seed layer, the second seed layer having a body centered cubic (BCC) crystal structure grown according to a <002> crystal direction with respect to a surface of the first seed layer thereunder;
- and
- a main magnetic layer on the second seed layer, wherein the main magnetic layer is grown according to the <002> crystal direction with respect to a surface of the second seed layer thereunder and wherein the first seed layer has a property to change a surface energy between the base layer and second seed layer to increase growth of the second seed layer in the <002> crystal direction.
A magnetic memory device, comprising:
- a conductive layer having a crystal structure;
- a crystalline stop layer on the conductive layer, the crystalline stop layer blocking continuity of the crystal structure;
- an amorphous layer on the crystalline stop layer;
- a NaCl structure layer on the amorphous layer;
- a first seed layer on the NaCl structure layer;
- a second seed layer above and directly on the first seed layer, the second seed layer grown according to a <002> crystal direction with respect to a surface of the first seed layer thereunder;
- and
- a main magnetic layer disposed on the second seed layer, the main magnetic layer grown according to the <002> crystal direction with respect to a surface of the second seed layer thereunder.
A magnetic memory device, comprising:
- a lower electrode;
- a magnetic memory layer on and electrically connected with the lower electrode, the magnetic memory layer including a lower magnetic layer, an upper magnetic layer, and a tunnel barrier layer;
- and
- an upper electrode on and electrically connected with the magnetic memory layer,
- wherein the lower magnetic layer includes:
- a base layer;
- a first lower seed layer on the base layer;
- a second lower seed layer above and directly on the first lower seed layer, the second lower seed layer having a body centered cubic (BCC) crystal structure grown according to a <002> crystal direction with respect to a surface of the first lower seed layer thereunder;
- and
- a lower main magnetic layer on the second lower seed layer, wherein the lower main magnetic layer is grown according to the <002> crystal direction with respect to a surface of the second lower seed layer thereunder and wherein the first lower seed layer has a property to change a surface energy between the base layer and second lower seed layer to increase growth of the second lower seed layer in the <002> crystal direction.
Dependencies are inferred from the claim text.