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US 8,803,212 B2Granted
Three-dimensional crossbar array
AssigneeHewlett-Packard Development Company, L.P.
InventorHans S. Cho
Life of this patent
Estimating the term…
Abstract
A three-dimensional crossbar array may include a metal layer, and an insulator layer disposed adjacent the metal layer. A trench may be formed in the metal layer to create sections in the metal layer, and a portion of the trench may include an insulator. A hole may be formed in the trench and contact a section of the metal layer. The hole may define a via. A contact region between the via and the section of the metal layer may define a crossbar array.
Claims20
A stacked crossbar array comprising:
- a plurality of stacked structures, each stacked structure comprising a metal layer and an insulator layer, wherein the plurality of stacked structures are separated from each other by an insulator portion;
- a via disposed in a hole in the insulator portion separating the stacked structures, wherein the hole contacts a metallic edge portion of the metal layer of at least one of the separated stack structures,
- wherein a contact region between the via and the contacted metallic edge portion defines a junction of the stacked crossbar array.
A stacked crossbar array comprising:
- an insulator substrate including a trench;
- a plurality of stacked structures in the trench, each stacked structure comprising a metal layer and an insulator layer, wherein the plurality of stacked structures are separated from each other by an insulator portion and each metal layer is in a shape of the trench;
- a via disposed in a hole in the insulator portion separating the stacked structures, wherein the hole contacts a metallic edge portion of the metal layer of at least one of the separated stack structures,
- wherein a contact region between the via and the contacted metallic edge portion defines a junction of the stacked crossbar array.
1 more element
A method of fabricating a stacked crossbar array, the method comprising:
- forming a plurality of stacked structures, each of the stacked structures comprising alternating layers of a metal layer and an insulator layer, the plurality of stacked structures separated from each other by an insulator portion;
- forming a hole in the insulator portion separating the stacked structures, the hole contacting an edge portion of each of the metal layers of at least one of the separated stack structures;
- and
- forming a via in the hole,
- wherein a contact region between the via and a contacted edge portion of each metal layer defines a junction of the stacked crossbar array.
2 more elements
Dependencies are inferred from the claim text.