Semiconductor wafer, insulated gate field effect transistor, and method for producing semiconductor wafer
AssigneeSumitomo Chemical Company, Limited
InventorNoboru Fukuhara
Life of this patent
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AssigneeSumitomo Chemical Company, Limited
InventorNoboru Fukuhara
Estimating the term…
Provided is a semiconductor wafer including a base wafer, a first crystalline layer, a second crystalline layer, and an insulating layer that are positioned in the stated order, the semiconductor wafer further including: a third crystalline layer positioned either between the first crystalline layer and the second crystalline layer or between the base wafer and the first crystalline layer. The second crystalline layer and the third crystalline layer are made of a crystal that either lattice matches or pseudo lattice matches a crystal making the first crystalline layer, and has a wider band gap than the crystal making the first crystalline layer. The third crystalline layer includes a first atom that will be a donor or an acceptor. When the third crystalline layer includes a first atom that will be a donor, the second crystalline layer includes a second atom that will be an acceptor.
A semiconductor wafer comprising:
Dependencies are inferred from the claim text.