Graphene transistors with self-aligned gates
AssigneeInternational Business Machines Corporation
InventorsAli Afzali-Ardakani, Phaedon Avouris, Damon B. Farmer, Yu-Ming Lin, Yu Zhu
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Abstract
Graphene transistor devices and methods of their fabrication are disclosed. One such graphene transistor device includes source and drain electrodes and a gate structure including a dielectric sidewall spacer that is disposed between the source and drain electrodes. The device further includes a graphene layer that is adjacent to at least one of the source and drain electrodes, where an interface between the source/drain electrode(s) and the graphene layer maintains a consistent degree of electrical conductivity throughout the interface.
Claims16
A graphene transistor device comprising:
- source and drain electrodes;
- a gate structure including a gate electrode and a dielectric sidewall spacer, wherein at least a portion of the sidewall spacer is disposed laterally from said gate electrode and between the source and drain electrodes;
- a seed layer disposed beneath said gate electrode and beneath said sidewall spacer, wherein at least one of the source and drain electrodes extend to the seed layer;
- and
- a graphene layer disposed beneath said seed layer and adjacent to the at least one of the source and drain electrodes wherein the gate electrode includes a recessed portion.
A graphene transistor system comprising:
- a substrate;
- source and drain electrodes;
- a gate structure including a dielectric sidewall spacer that is disposed between the source and drain electrodes;
- a seed layer disposed beneath said gate structure in contact with the dielectric sidewall spacer;
- and
- a graphene layer beneath said seed layer and adjacent to at least one of the source and drain electrodes, wherein at least one anchor site formed of at least one exposed portion of the substrate is within the graphene layer and is in contact with said gate structure wherein the gate electrode includes a recessed portion.
A graphene transistor device comprising:
- source and drain electrodes;
- a gate structure including a gate electrode and a dielectric sidewall spacer, wherein at least a portion of the sidewall spacer that is disposed laterally from said gate electrode and between the source and drain electrodes;
- a seed layer disposed beneath said gate electrode and beneath said sidewall spacer, wherein at least one of the source and drain electrodes extend to the seed layer;
- and
- a graphene layer disposed beneath said seed layer and adjacent to the source and drain electrodes, wherein an interface between the source and drain electrodes and the graphene layer maintains a consistent degree of contact and a consistent degree of electrical conductivity between the graphene layer and the source and drain electrodes throughout the interface wherein the gate electrode includes a recessed portion.
Dependencies are inferred from the claim text.