Ionization cell for a mass spectrometer, and corresponding leak detector
AssigneeAdixen Vacuum Products
InventorsLaurent Ducimetiere, Cyrille Nomine, Jean-Eric Larcher
Life of this patent
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AssigneeAdixen Vacuum Products
InventorsLaurent Ducimetiere, Cyrille Nomine, Jean-Eric Larcher
Estimating the term…
An ionization cell for a mass spectrometer (2) includes: an ionization housing (10) having a first and a second electron input groove (11, 26) and one side (16) of which has an output groove (15) for passing ionized particles (14a, 14b, 14c) therethrough, a first working filament (13) placed opposite the first electron input groove (11) and intended to be supplied to produce an electron beam (12), and a second backup filament (22) placed opposite the second electron input groove (26) and intended to be supplied in the event the first working filament (13) fails so as to produce the electron beam, the input groove (26) being placed outside a front region (F) located opposite the first input groove (11). The invention also relates to a leak detector with a mass spectrometer, which includes such an above-described ionization cell.
An ionization cage (10) comprising first and second electron entrance slits (11, 26) in opposite sides thereof, and having an exit slit (15) for the passage of ionized particles (14a, 14b, 14c);
An ionization cell, for a mass spectrometer (2), comprising:
An ionization cell, for a mass spectrometer (2), comprising:
Dependencies are inferred from the claim text.