Inspection system by charged particle beam and method of manufacturing devices using the system

An inspection apparatus for inspecting a sample by irradiating either of charged particles or electromagnetic waves onto the sample, the apparatus comprising:

• a beam generator for generating either of the charged particles or the electromagnetic waves as a beam;
• a stage device for mounting the sample thereon;
• an electron-optical system for guiding and irradiating the beam as a primary beam onto the sample mounted on the stage device, and guiding a secondary charged particles emitted from a surface of the sample when irradiating the primary beam onto the sample;
• a first detector for detecting the secondary charged particles and providing an image processing system with an electric signal corresponding to an intensity of the secondary charged particles;
• and
• a mechanism for controlling an electric charge of the sample comprising:
• an electrode located in the proximity of the sample when it has been mounted on the stage device;
• a second detector for detecting an amount of electric charge of the electrode;
• and
• a power source for supplying a voltage to the electrode in response to the detected amount of the electric charge, to offset the electric charge of the electrode.