Sensor for determination of the incidence angle of radiation and method for measurement the incidence angle using such a sensor
AssigneeSilicon Micro Sensors GmbH
InventorsErik Busse, Wilhelm Prinz von Hessen
Life of this patent
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Abstract
A sensor and a corresponding method for the determination of the incidence angle of a radiation source are provided. The sensor has a diode assembly of avalanche photodiodes in a semiconductor layer and an application specific integrated circuit, a distance layer, an aperture structure located on the distance layer, and contacts for electrically connecting the sensor. The layers and structures are positioned directly on top of each other and match in their shape, size or thickness.
Claims17
Sensor for determination of an incidence angle of a radiation source, comprising:
- in a semiconductor layer, a diode assembly of avalanche photodiodes comprising a position sensitive detector, and an application specific integrated circuit for generation of analogue output signals that can be evaluated,
- a transparent distance layer for the adjustment of a distance, an aperture structure on the distance layer and comprising a defined opening in a non-transparent layer, and
- contact means for electrically connecting the sensor,
- wherein the diode assembly comprises n pairs of avalanche photodiodes with n=1, 2, 3 etc. arranged in such a way that the avalanche photodiodes are positioned axially symmetrically in relation to both axes x and y for the determination of the position of the incident radiation, and so that the opening of the aperture structure depending on the incidence angle of the radiation can be partly imaged on the avalanche photodiodes of this diode assembly respectively.
Sensor for determination of an incidence angle of a radiation source, comprising:
- in a semiconductor layer, a diode assembly of avalanche photodiodes comprising a position sensitive detector, and an application specific integrated circuit for generation of analogue output signals that can be evaluated,
- a transparent distance layer for the adjustment of a distance, an aperture structure on the distance layer and comprising a defined opening in a non-transparent layer, and
- contact means for electrically connecting the sensor,
- wherein the opening is arranged above the diode assembly, and matches shape and size of the diode assembly as well as a thickness of the distance layer in such a way that consistently provides an imaging of incident radiation on at least one part of the diode assembly through the aperture structure, and thus, enables the determination of a position of a geometrical radiation focal point of the incident radiation.
Sensor for determination of an incidence angle of a radiation source, comprising:
- in a semiconductor layer, a diode assembly of avalanche photodiodes comprising a position sensitive detector, and an application specific integrated circuit for generation of analogue output signals that can be evaluated,
- a transparent distance layer for the adjustment of a distance, an aperture structure on the distance layer and comprising a defined opening in a non-transparent layer,
- contact means for electrically connecting the sensor, and
- a twilight sensor.
Sensor for determination of an incidence angle of a radiation source, comprising:
- in a semiconductor layer, a diode assembly of avalanche photodiodes comprising a position sensitive detector, and an application specific integrated circuit for generation of analogue output signals that can be evaluated,
- a transparent distance layer for the adjustment of a distance, an aperture structure on the distance layer and comprising a defined opening in a non-transparent layer, and
- contact means for electrically connecting the sensor,
- wherein the distance layer comprises glass anodically bonded to the semiconductor layer.
Method for determination of incidence angle of a radiation source using a sensor, comprising a position sensitive detector with a diode assembly of avalanche photodiodes, an application specific integrated circuit for generating analogue output signals that can be evaluated in a linear manner, a transparent distance layer for adjusting a distance, and an aperture structure arranged on the distance layer and comprising a defined opening in a non-transparent layer, comprising following steps:
- readout of single photocurrents, generated as a consequence of incident radiation on the avalanche photodiodes, through fluctuations in voltages, the incident radiation passing through the opening of the aperture structure on the diode assembly of the position sensitive detector
- conversion of the voltages in the sensor into two continuous, electrical signals Ax and Ay, which are consistent with a position of a geometrical focal point (x,y) of the radiation, and which are calculated from a quotient of differences and sums of the voltages generated in corresponding x and y directions, and consistent with the respective photocurrents, wherein:
- Ax:
- position of geometrical radiation focal point in x-direction
- Ay:
- position of geometrical radiation focal point in y-direction
- calculating an azimuth and an elevation angle from the signals Ax and Ay, which characterize the position of the radiation focal point by using corresponding tangent relations.
Dependencies are inferred from the claim text.