Cleaning liquid and anticorrosive agent comprising a mercapto compound and solvent
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTomoya Kumagai, Takuya Ohhashi, Takahiro Eto, Daijiro Mori, Takayuki Haraguchi
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Abstract
A method of cleaning a substrate having a metal layer including copper or a copper-containing alloy, the method including cleaning the substrate using a cleaning liquid that includes a mercapto compound represented by one or both of the following formulas (1) and (2), and a solvent containing water and a water-soluble organic solvent: in which R represents a substituent group; m is an integer of 1 to 3; and n is an integer of 0 to 3, when m is 2 or 3, R may be the same or different; HS—(CH2)x—OH (2), in which x is an integer of no less than 3.
Claims5
A method of cleaning a substrate having a metal layer comprising copper or copper-containing alloy, the method comprising cleaning the substrate including a metal layer comprising copper or a copper-containing alloy using a cleaning liquid, wherein the cleaning liquid comprises (A) a mercapto compound, and (B) a solvent, wherein the mercapto compound (A) is at least one selected from the group consisting of compounds represented by the following formula (1):
- wherein, R represents a group selected from the group consisting of a hydroxyl group, an ethyl group, an n-propyl group, an iso-propyl group, an n-butyl group, an iso-butyl group, a sec-butyl group, a tert-butyl group, an alkoxy group having 1 to 4 carbon atoms, an alkylthio group having 1 to 4 carbon atoms, a hydroxyalkyl group having 1 to 4 carbon atoms, a mercaptoalkyl group having 1 to 4 carbon atoms, a halogenated alkyl group having 1 to 4 carbon atoms and a halogen atom;
- m is an integer of 1 to 3;
- and n is an integer of 0 to 3, wherein provided that m is 2 or 3, R may be the same or different;
- and selected from the group consisting of
- HS—(CH2)4—OH;
- HS—(CH2)5—OH;
- HS—(CH2)6—OH;
- HS—(CH2)7—OH;
- HS—(CH2)8—OH;
- HS—(CH2)9—OH;
- and
- HS—(CH2)10—OH,
- wherein the solvent (B) contains water and a water-soluble organic solvent.
Dependencies are inferred from the claim text.