Pattern forming method
AssigneeCanon Kabushiki Kaisha
InventorsKenichi Iida, Toshiki Ito
Life of this patent
Estimating the term…
Abstract
In a pattern forming method, a pattern having at least either a recess or a protrusion of a curable composition is formed of a curable composition by curing the curable composition into a cured film with a mold having a surface provided with at least either a recess or a protrusion, and separating the mold from the curable composition. The method includes (i) forming a gas generation region containing a gas generator agent so that the gas generation region will be disposed in contact with both the mold and the cured film between the mold and the cured film, (ii) generating a gas from the gas generation region, and (iii) separating the mold from the cured film during or after the step of (ii).
Claims16
A pattern forming method for forming a pattern having at least one of a recess and a protrusion of a curable composition by curing the curable composition disposed on a work substrate into a cured film in a state where a mold having a surface provided with at least one of a recess and a protrusion is substantially in contact with the curable composition, and separating the mold from the cured film, the method comprising:
- (i) forming a gas generation region containing a gas generator agent so that the gas generation region will be disposed in contact with both the mold and the cured film between the mold and the cured film;
- (ii) generating a gas from the gas generation region;
- and
- (iii) separating the mold from the cured film during or after the step of(ii),
- wherein the gas generation region is formed so that the curable composition will not generate a gas in the step of (ii).
A pattern forming method for forming a pattern having at least one of a recess and a protrusion of a curable composition by curing the curable composition disposed on a work substrate into a cured film in a state where a mold having a surface provided with at least one of a recess and a protrusion is substantially in contact with the curable composition, and separating the mold from the cured film, the method comprising:
- (i) forming a gas generation region containing a gas generator agent so that the gas generation region will be disposed in contact with both the mold and the cured film between the mold and the cured film;
- (ii) generating a gas from the gas generation region;
- and
- (iii) separating the mold from the cured film during or after the step of (ii),
- wherein the gas generator agent is a compound that will generate a gas by receiving a pressure, and the step of (ii) is performed by applying a pressure to the gas generation region.
Dependencies are inferred from the claim text.