Plasma processing method
AssigneePanasonic Corporation
InventorsTomohiro Okumura, Ichiro Nakayama, Hiroshi Kawaura, Tetsuya Yukimoto
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Abstract
In a plasma torch unit, copper rods forming a coil as a whole are disposed inside copper rod inserting holes formed in a quartz block so that the quartz block is cooled by water flowing inside the copper rod inserting holes and cooling water pipes. A plasma ejection port is formed on the lowermost portion of the torch unit. While a gas is being supplied into a space inside an elongated chamber, high-frequency power is supplied to the copper rods to generate plasma in the space inside the elongated chamber so that the plasma is applied to a substrate.
Claims3
An inductive coupling-type plasma processing method comprising:
- supplying a gas through a gas introducing port into a chamber that has an elongated space, is installed in a case, and is surrounded by a dielectric member, ejecting the gas from a slit-shaped opening toward a substrate, the slit-shaped opening being formed in the chamber and being in communication with the elongated space, wherein a longitudinal direction of the opening is parallel to a longitudinal direction of the chamber, and supplying high-frequency power to a coil that is arranged in an elongated hole surrounded by the dielectric member, and is formed by a plurality of conductor rods installed in the case, to generate a high-frequency electromagnetic field in the chamber so that plasma is generated in the chamber supplied with the gas, in a state where ends of the conductor rods are electrically connected to each other such that the conductor rods overall form the coil, and the conductor rods are disposed such that the elongated space is interposed in between the conductor rods;
- and
- processing a surface of the substrate, while shifting the chamber and the substrate in a direction perpendicular to the longitudinal direction of the opening, relative to each other.
Dependencies are inferred from the claim text.