Micro bump and method for forming the same
AssigneeIndustrial Technology Research Institute
InventorsRuoh-Huey Uang, Yi-Ting Cheng
Life of this patent
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Abstract
A method for forming a micro bump includes forming a first nano-particle layer on a substrate and forming a second nano-particle layer on the first nano-particle layer. The first and second nano-particle layers include a plurality of first nano particles and a plurality of second nano particles, respectively. The method further includes irradiating a laser beam onto the second nano-particle layer, where the laser beam penetrates through the second nano-particle layer and is at least partially absorbed by at least some of the first nano particles to generate heat. The first nano particles and the second nano particles have different absorption rates with respect to the laser beam.
Claims11
A method for forming a micro bump, comprising:
- forming a first nano-particle layer on a substrate, the first nano-particle layer including a plurality of first nano particles;
- forming a second nano-particle layer on the first nano-particle layer, the second nano-particle layer including a plurality of second nano particles;
- and
- irradiating a laser beam onto the second nano-particle layer, the laser beam penetrating through the second nano-particle layer and being at least partially absorbed by at least some of the first nano particles to melt at least a portion of the first nano particles, ones of the melted first nano particles adhering to ones of the second nano particles,
- wherein the first nano particles and the second nano particles have different absorption rates with respect to the laser beam.
A method for forming a micro bump, comprising:
- forming a first nano-particle layer on a substrate, the first nano-particle layer including a plurality of first nano particles;
- patterning the first nano-particle layer to form a plurality of adhesion pads;
- forming a second nano-particle layer directly on the adhesion pads and over the substrate, the second nano-particle layer including a plurality of second nano particles;
- and
- irradiating a laser beam onto the second nano-particle layer, the laser beam penetrating the second nano-particle layer and being at least partially absorbed by at least some of the first nano particles in the adhesion pads to melt at least a portion of the first nano particles, ones of the melted first nano particles adhering to ones of the second nano particles,
- wherein the first nano particles and the second nano particles have different absorption rates with respect to the laser beam.
Dependencies are inferred from the claim text.