Substrate depositing system and depositing method using the same
AssigneeSamsung Display Co., Ltd.
InventorsJeong-Ho Yi, Suk-Won Jung, Seung-Ho Choi
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Abstract
A substrate depositing system and a method of using a substrate depositing system. A substrate depositing system includes a load-lock chamber for loading and unloading a substrate, at least one transfer chamber connected to the load-lock chamber and including a substrate transfer device configured to vertically transfer the substrate, and a pair of depositing chambers connected to opposite sides of the at least one transfer chamber and including a depositing source and a pair of substrate fixing devices, the substrate transfer device including a pair of substrate installing members.
Claims7
A substrate deposition method comprising:
- installing a pair of first substrates in a pair of substrate installing members of a substrate transfer device and vertically transferring the pair of first substrates to a transfer chamber;
- rotating the pair of substrate installing members;
- transferring the pair of first substrates to at least one depositing chamber connected to the transfer chamber and installing the pair of first substrates in at least one first substrate fixing device;
- installing a pair of second substrates that are installed in at least one second substrate fixing device and have a deposition material deposited thereon in the pair of substrate installing members and transferring the pair of second substrates to the transfer chamber;
- rotating the pair of substrate installing members;
- transferring the pair of second substrates from the transfer chamber;
- and
- moving a depositing source in a direction parallel to the pair of first substrates and depositing a deposition material on the pair of first substrates.
Dependencies are inferred from the claim text.