Method for manufacturing a photovoltaic cell structure
AssigneeTel Solar AG
InventorsJohannes Meier, Markus Bronner, Markus Kupich, Tobias Roschek, Hanno Goldbach
Life of this patent
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Abstract
In the frame of manufacturing a photovoltaic cell a layer (3) of silicon compound is deposited on a structure (1). The yet uncovered surface (3a) is treated in a predetermined oxygen (O2) containing atmosphere which additionally contains a dopant (D). Thereby, the silicon compound layer is oxidized and doped in a thin surface area (5).
Claims14
A method for manufacturing a photovoltaic cell structure comprising two electrodes and at least one silicon compound layer, comprising
- a) depositing, in a first vacuum chamber, said silicon compound layer upon a carrier structure for said silicon compound layer, resulting in a first surface of said silicon compound layer resting on said carrier structure and a second surface of said silicon compound layer, the second surface not being covered with a precursor;
- b) treating, in said first vacuum chamber, said uncovered second surface of said silicon compound layer by oxidizing said second surface in a predetermined oxygen- and dopant-gas-containing atmosphere, thereby enriching said second surface of said silicon compound layer with a dopant, the oxidation of said second surface being performed to avoid uncontrollable influences from subsequent ambient air exposure;
- c) moving said photovoltaic cell structure comprising said treated second surface from said first vacuum chamber to a second vacuum chamber through said ambient air;
- and
- d) depositing, in the second vacuum chamber, a further layer upon said second surface of said moved photovoltaic cell structure.
A method for manufacturing a photovoltaic cell structure comprising two electrodes and at least one silicon compound layer, comprising
- a) depositing, in a vacuum chamber, said silicon compound layer upon a carrier structure for said silicon compound layer, resulting in a first surface of said silicon compound layer resting on said carrier structure and a second surface of said silicon compound layer, the second surface not being covered additionally with solid material;
- b) treating, in said vacuum chamber, said uncovered second surface of said silicon compound layer by oxidizing said second surface in a predetermined oxygen- and dopant-gas-containing atmosphere, thereby enriching said second surface of said silicon compound layer with a dopant, the oxidation of said second surface being performed to avoid uncontrollable influences from subsequent ambient air exposure;
- c) removing said photovoltaic cell structure comprising said treated second surface from said predetermined oxygen- and dopant-gas-containing atmosphere into said ambient air;
- and
- d) depositing a further layer upon said second surface of said removed photovoltaic cell structure.
A method for manufacturing a photovoltaic cell structure comprising two electrodes and at least one silicon compound layer, comprising
- a) depositing, in a vacuum chamber, said silicon compound layer upon a carrier structure for said silicon compound layer, resulting in a first surface of said silicon compound layer resting on said carrier structure and a second surface of said silicon compound layer, the second surface being uncovered;
- b) treating, in said vacuum chamber, said uncovered second surface of said silicon compound layer by oxidizing said second surface in a predetermined oxygen- and dopant-gas-containing atmosphere, thereby enriching said second surface of said silicon compound layer with a dopant, the oxidation of said second surface being performed to avoid uncontrollable influences from subsequent ambient air exposure;
- c) exposing said treated second surface to said ambient air;
- and
- d) depositing upon said exposed second surface a further layer.
Dependencies are inferred from the claim text.