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US 8,802,352 B2Granted
Salt, photoresist composition and method for producing photoresist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKoji Ichikawa, Yuichi Mukai, Isao Yoshida
Life of this patent
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Abstract
A salt represented by formula (I): wherein Q1, Q2, L1, W, and Z+are defined in the specification.
Claims6
A salt represented by formula (I):
- wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group,
- the moiety L1-OH of formula (I) is represented by formula (L1-1):
- wherein X0 represents a single bond,
- a C1-C14 divalent aliphatic hydrocarbon group which can have a fluorine atom or a hydroxyl group, or
- a group represented by formula (a-1):
- -A10X10-A11s X11-A12-* (a-1)
- where s represents an integer of 0 or 1, X10 and X11 each independently respect an oxygen atom, a carbonyl group, a carbonyloxy group, or an oxycarbonyl group, A10,A11 and A12 each independently represent a C1-C12 divalent aliphatic hydrocarbon group which can have a fluorine atom or a hydroxyl group, * represents a binding position to a corbon atom, X1 represents —O-*1, —NR2-*1, —O—CO-*1, —O—CH2—CO—O-*1 or —NR2—CH2-*1 where *1 represents a binding position to W,
- *0 represents a binding position to a carbon atom binding to Q1 and Q2, and
- m1 represents an integer of 0 to 6,
- W represents a C3-C36 alicyclic hydrocarbon group
- in which a methylene group can be replaced by an oxygen atom, a sulfur atom, a carbonyl group or a sulfonyl group, and in which a hydrogen atom can be replaced by a hydroxy group, a C1-C12 alkyl group, a C1-C12 alkoxy group, C3-C18 alicyclic hydrocarbon group or C6-C14 aromatic hydrocarbon group, and
- Z+ represents an organic cation.
9 more elements
Dependencies are inferred from the claim text.