Water-dispersible electrically conductive fluorine-containing polyaniline compositions for lithography
AssigneesInternational Business Machines Corporation, Shin-Etsu Chemical Co., Ltd.
InventorsLuisa Dominica Bozano, Takayuki Nagasawa, Mark Hull Sherwood, Ratnam Sooriyakumaran, Linda Karin Sundberg, Satoshi Watanabe
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