Radiation-sensitive resin composition

A radiation-sensitive resin composition comprising:

• (A) an acid labile group-containing resin, which becomes alkali-soluble by an action of an acid, and which comprises a repeating unit having a lactone skeleton;
• (B) a radiation-sensitive acid generator;
• and
• (C) a solvent,
• the resin (A) comprising repeating units shown by formulas (1) and (2),
• wherein R1 represents a hydrogen atom or an unsubstituted methyl group, X represents a hydroxyl group, and m represents an integer from 1 to 18,
• wherein, R2 represents a hydrogen atom or an unsubstituted methyl group, R3 represents a substituted or unsubstituted alkyl group having 1 to 4 carbon atoms, and n represents an integer from 4 to 8,
• wherein a content of the repeating unit shown by formula (1) in the resin (A) is from 5 to 20 mol %, a content of the repeating unit shown by formula (2) in the resin (A) is from 5 to 50 mol %, and a content of the repeating unit having a lactone skeleton in the resin (A) is not more than 41.9 mol %,
• wherein the repeating unit shown by the formula (2) comprises at least one repeating unit selected from repeating units derived from compounds shown by formulas (M-2-1) and (M-2-2),
• wherein R2 represents a hydrogen atom or an unsubstituted methyl group,
• wherein the repeating unit having a lactone skeleton in the resin (A) is derived from a compound shown by a formula (M-3),