Method for making grating
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsZhen-Dong Zhu, Qun-Qing Li, Li-Hui Zhang, Mo Chen, Shou-Shan Fan
Life of this patent
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Abstract
A method for making grating is provided. The method includes following steps. A substrate is provided. A mask layer is located on the substrate. The mask layer is patterned, and a number of bar-shaped protruding structures are formed on a surface of the mask layer, a slot is defined between each of two adjacent protruding structures of the number of protruding structures to expose a portion of the substrate. The protruding structures are etched so that each of two adjacent protruding structures begin to slant face to face until they are contacting each other. The exposed portion of the substrate is etched through the slot. The mask layer is removed.
Claims19
A method for making a grating, comprising:
- applying a mask layer on a surface of a substrate;
- forming a plurality of bar-shaped protruding structures to expose a portion of the substrate by patterning the mask layer, wherein the plurality of bar-shaped protruding structures extend along a direction substantially parallel with the surface of the substrate;
- etching the plurality of protruding structures so that each of two adjacent protruding structures begin to slant face to face until they contact each other;
- patterning exposed portion of the substrate to form a plurality of three-dimensional nano-structure preforms, wherein a cross section of each of the plurality of three-dimensional nano-structure preforms is triangular;
- and
- removing the mask layer.
A method for making a grating, comprising:
- locating a mask layer on a substrate, wherein the mask layer comprises a plurality of bar-shaped protruding structures, and a slot defined between each of two adjacent protruding structures of the plurality of protruding structures to expose a portion of the substrate;
- etching the plurality of protruding structures so that each of two adjacent protruding structures begin to slant face to face until they are contacting each other to form a protruding pair;
- etching exposed portions of the substrate through the slot to form a plurality of three-dimensional nano-structure preforms, wherein a cross section of each of the plurality of three-dimensional nano-structure preforms is isosceles triangular;
- and
- removing the mask layer.
Dependencies are inferred from the claim text.